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Micro-CVD/PVD Furnace for in-Situ Analysis w. 2 Heating Zones, 1100ºC Max. - GSL-1100-Micro
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In stock
Item Number: GSL-1100-Micro
Transported by LTL Freight (Truck)
Personalization
Upgrade to Eurotherm Temp Controllers (Dual )
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GSL-1100-Micro is a micro-tube furnace of CVD/PVD (also called hybrid PVD and CVD, HPCVD). There are two heating plates in a 25 mm ID quartz tube with a flat UV--grade window. The micro tube furnace can be placed under an optical microscope or Raman spectrum to observe 2-dimensional film growth in situ by PCV, CVD, or hybrid PVD/CVD up to 1100ºC.
SPECIFICATIONS:
Power Requirement |
- Single Phase 208 - 240VAC, 50/60Hz, single phase
- 3000W (15Amp circuit breaker is required)
- 220VAC version is available via a transformer
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Furnace Structure


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- Special quartz tube: OD 30 x ID 24 x L370 (mm), One 12 mm Dia flat UV- grade window is welded on the tube for in-situ observation of film growth.
- Vacuum-sealed flange: one pair of the flange is included with the feed-throughs of electrodes, thermal couple, gas inlet & outlet with KF 25 vacuum port
- Micro-Heating Plates: Two ceramic-coated heating plates of W17 x L 25 mm are inserted into the processing tube from two ends. The left-side heating plate is adjustable
- Max. heating temperature: 1100ºC
- Max. Heating rate: 5ºC/S ( 300ºC/minute )
- Flange supports are included with adjustable height
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Temperature Controller

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- A dual Temperature Control Unit with 30 Segments Programmable is included for controlling two heating plats independently.
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
- +/- 1ºC temperature accuracy.
- Two K-type thermocouples (one for each zone).
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Optional ( click the pictures to order at extra cost)
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Dimensions
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Warranty |
One-year limited warranty with lifetime support. (Consumable parts such as processing tubes, and o-rings are not covered by the warranty, please find the replacements at related products below.) |
Laptop, software & WiFi Control (Optional) |
- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
- Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces.
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Reference Video |
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Compliance |
- CE Certified
- NRTL or CSA certification at extra cost. (please click marks below to learn details)
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Sale Price: Starting at USD$4,698.00
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