• Two Precision Mass Flow Controller  ( MFC) in side )
• Working Temp. : 5~45 ºC  
• Max. Pressure: 3x10⁶ Pa  
• Accuracy: ±1.5% FS  
• Liner: ±（0.5-1.5）%F.S.
• Duplicate accuracy: ±0.2%F.S.
• Controlling Range:
• Controller 1: 1~ 99 SCCM
• Controller 2: 1~199 SCCM

Power

• Voltage:  AC 208 - 240V Single phase 50/60Hz
• Power:   100 W in total
• May order a 100W transformer to operate at 110VAC ( Click Pic below to order )

PLC Touch Screen  

•  6" color touch screen control panel to make parameter setting at easy.
• Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now. 

• One stainless steel gas mixing tank is built-in
• Internal pipeline: 1/4" O.D stainless steel
• External pipeline: 1/4" O.D PTFE
• Gas Mixing Tank:  Φ80X120mm
• Stop Valve & Fittings：  
• 316 stainless steel needle valve, 
• Φ1/4” Swagelok Tube Fitting

• Dimension: 360 mm L x 300 D mm x 190 H mm 
• Weight:        8.4Kg

• All components are CE certified 
• NRTL (UL61010) or CSA certification is available at extra cost. （ please click marks below to learn details )

           

• An Optional oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture left to learn more: