• Ultra-high frequency (1.7Mhz) ultrasonic atomizer can deliver sub-micron droplets to the heated flowed for the subsequent decomposition and CVD coating on powder.
• Provides uniform distribution of the gas and solution sub-micron particles blast over the entire cross-section of the tube chamber
• Solid particles are suspended by an upward gas flowing
• Excellent heat transfer and coating to every single suspended particle 
• Processed materials can be discharged from the top side of the tube after the cap is been taken off

• 1.7MHz ultra-high frequency Ultrasonic Generator can generate sub-micron solution particles
• Fluoropolymer-coated liquid container and Fluoropolymer sealing gaskets
• external Fluoropolymer optical sensor and valve for keeping the liquid level to the correct height and preventing damage to the nebulizing element, should the unit run dry.
• Ultrasonic power programmable,0~100%, 5% increment.
• 304 Stainless Steel T-piece (1.5'' sanitary fitting) with 1/4'' tube fitting adapters enables the use of carrier gas.

• Frit: 15~40 microns porous, 22mm O.D x 4mm thick
               

• Double-layer steel structure with air cooling
• Split door design for easy installation of tube
• High-purity Al2O3 fibrous insulation designed for maximum energy saving

Power

1200W

Voltage

Max. Temperature

1100^oC

Continuous Temperature

1000^oC

Max. Heating Rate

<= 20 ^oC /min

Tube Size and Materials

• One quartz tube is included. Main tube with bottom frit and enlarged space for particle processing
• Two Ends: 25mm O.D, 22mm I.D; Central: 50mm O.D, 44mm I.D, for detailed size, please refer to the picture below.
• Central enlarged area ensures high aerodynamic performance

Sealing Flanges

• Bottom flange: Regular designed 1'' bottom flange with 1/4'' tube fitting for introducing primary gas 
• Top Flange: Special designed 1'' top flange with backstreaming secondary (precursor) gas inlet and exhaust, please click the picture below for detail

Options

• Das delivery may be needed for gas control
• Oxygen Monitoring: An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:

        

Heating Zone Length

200mm  (single zone)

Temperature Controller

• 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
• Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
• Over temperature protection and alarm allow for operation without attendant(s).
• +/- 1 ºC temperature accuracy.

Dimensions

Net Weight

~20 Kg (excluding mobile cart)

Shipping Weight

200 lbs

Warranty 

• One-year limited warranty (Consumable parts such as heating elements, processing tubes, and o-rings are not covered by the warranty, please order the replacement at related products below.)

Compliance

• CE Certified
• The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. （ please click marks below to learn details )

                       

Warning

Click here to learn the installation of a gas regulator

• Tube furnaces with quartz tubes are designed for use under low positive pressure < 0.2 bars / 3 psi / 0.02 Mpa
• The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) to reduce thermal shocks to the tube
• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn about the installation of a gas regulator.
• Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 

Operation Instructions