Furnace Structure

• A double-layer steel casing with air cooling keeps the furnace surface temperature lower than 60°C.  
• High-purity fibrous alumina insulation for maximum energy saving.
• The special refractory coating on the liner and heating element increases furnace life.

Power

 7 KW

Voltage

 AC 208-240 Single Phase, 50/60 Hz

Max. Temperature

 1200° C (<5hr) at  inert gas atmosphere

Continuous Temperature

 1100°C

Max. Heating Rate

 <= 20  ^oC /min

Heating Zone Length

• Heating zone length: 880 mm ( single zone )
• Constant temperature area: 240mm with +/- 1oC

Constant Temperature Zone

 240  mm (+/-1° C)

Heating Elements

 Fe-Cr-Al Alloy doped by Mo

Thermocouple Type

 K Type Thermocouple

• MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
• Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
• Over-temperature protection and alarm allow for operation without attendant(s).
• +/- 1 ºC temperature accuracy.
• RS485 Communications Port.
• Advanced Temperature Control (Optional)
• MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit. 
  
• You may upgrade the temperature controller to the Eurotherm 3000 Temperature Controller within +/ 0.1oC accuracy,  which is fully compatible with LabVIEW. This package includes a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of the Eurotherm 3504 temperature controller. 

• Made of high-quality Fused quartz with the size of 130 mm O.D x 120 mm ID x 1400 mm L
• Optional tube diameter:s  80mm, 100mm
• Two fibrous ceramic tube blocks are included for blocking heat radiation from inside the tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
• Quartz blocks (optional) are ideal for a cleaner processing environment and higher vacuum efficiency.
• You may use 4" wafer carrier to do oxidation and diffusion
• You may order flange support to avoid tube rotating ( click Pic below right )

• One pair of SS 304 vacuum flange with double high-temperature silicone O-ring is Included/
• Two needle valves with a 1/4" pipe adapter are installed on the flanges.
• One vacuum/ pressure gauge is installed on one side flange
• The vacuum level can reach 10^-2 torr by a quality mechanical vacuum pump and 10^-5 torr by a molecular pump
• Optional:
  

  • You may choose a flange with a KF25 vacuum port for a faster and better vacuum, also, please choose a quality mechanical pump or digital  molecular pump ( click the picture below to order at extra cost )

         

Sliding Flange  

(Optional at Extra Cost)

• One sliding flange for transporting samples (manually operated) is available as an option at $1995 extra cost.

• Referring to the picture above, you may need to order two mobile carts to support the sliding device ( click on underlined to order）

Dimensions

 1100 X 450 x 670mm

Net Weight

 80 Kg

Shipping Weight

 410 lbs

Shipping Package Size

 60x40x43  inch

Warranty

• CE Certified
• NRTI or CSA Certification is available upon request, additional charges will apply

• Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn about the installation of a gas regulator.
  
• Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
• Click here to learn how to set up a quartz/ ceramic tube and vacuum flange for the MTI Tube furnace. ( also, click the picture below to see the demo video )
• Please click here to see our typical temperature profile calibration result at various temperatures. 
  
• To obtain an accurate temperature inside the tube furnace, please click here to learn how to calibrate the temperature on your own.

Operation Instructions