• Double-layer steel casing with air cooling
• High-purity alumina fiber insulation for max. energy saving
• Splittable cover for easy tube replacement

Power Consumption

5 KW

Input Voltage

AC 208-240V Single Phase, 50 or 60 Hz 

Maximum Temperature

1200 ^oC

ContinuousTemperature

1100 ^oC

Maximum Heating Rate

<= 20 ^oC /min

Heating Zone Length

• Three zones: (880mm, 35" in total)
• Zone 1: 220mm  (8.6" )
• Zone 2: 440mm  (17.3")
• Zone 3: 220 mm (8.6")

Constant Temperature Zone

• If three zones are set at the same temperature, the constant temperature zone is 25" (625 mm) long with a temperature discrepancy of +/- 1^oC.
• If using only one zone (center zone), the constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1^oC.

Temperature Accuracy

+/- 1^oC

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Temperature Controller

• Three precision temperature controllers to control three zones separately.
• PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
• Built-in overheating & broken thermocouple protection.
• Over temperature protection and alarm allows for operation without attendant(s).
• +/- 1 ºC temperature accuracy.
• RS485 Communications Port.
  
• Optional:  
• The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at an extra cost. 
• The new version of PC module is now compatible with Lab View 05/08/2014
• If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.

• 80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube included.
• Vacuum flanges with valves and pressure gauges are included. 
• The thermal block must be placed inside the tube as in the drawing below 
•    click here to choose a crucible   

• Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
• Gauge is installed on the vacuum flange (right side) of the tube furnace and provides a wide measure range (10^^-5 ~ 1000 torr).
• Optional:   click the pic-below- right to order the Constant temperature control module.
  
  

• Slide for transferring sample (manually operated) is available as an option at $1900 extra cost (please refer to pictures below).
  Please click here to order 3"wafer quartz boat to anneal 3" wafer 

•        

• Two stainless steel flanges with both vacuum gauge and valves included.
• Min. vacuum pressure achieved by the mechanical pump is 5.5 m-torr. ( 5.5x10^^-3 torr). The pressure can reach 10^^-5 torr by using a mechanical + molecular pump.
• The leaking rate is < 5 m-torr / min. and stable vacuum pressure after 24 hours is < 2 torr.
• Click the picture below to get a details chart and data measured by CE certified vacuum meter:        

(For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X axis is passed over in the chart, therefore, steep variety in there)

Oxygen Monitoring

An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
         

Vacuum Pump

• 120 L/m Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10^^-2torr. Stainless steel hose tube is included for connecting to the tube furnace.
  
• Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with a motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.

• Three gas flow meters (4% accuracy FS) are installed inside the mobile case to enable monitoring of gas flowing rates (three different kinds of gases in total).
•  Compact direct read flow meter, 10-100 cc/min.
•  Compact direct read flow meter, 16-160 cc/min.
•  Compact direct read flow meter, 25-250 cc/min.
• Four pressure meters are installed inside the mobile cart which is able to monitor three types of flowing gas pressure as well as the pressure of the mixing tank.

Dimensions

• Furnace: 1100 X 450 x 670 mm
• Bottom Mobile case: 600x600x597 mm

Shipping Weight

 850 Lbs

Shipping Dimensions

Total Three Pallets
#1: 60" x 45" x 40"
#2: 48" x 40" x 42"
#3: 48" x 40" x 42"

Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).

Laptop & software  (Optional)
    

• Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
• Labview-Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.

Compliance

Application Notes

Click here to learn the installation of a gas regulator

• Please click here to see our typical temperature profile calibration result at various temperatures.
• From 7/15/08, MTI calibrate each furnace by NIST certificated Omega CL3515R precision Temperature calibrator, and pre-set temperature off (SC value) in the controller before shipping.
• In order to obtain an accurate temperature inside the tube furnace, you need to calibrate the temperature by yourselves. Please click here to learn how.
• How to set up ceramic tube and vacuum flange for MTI Tube furnace.
• Tube furnaces with alumina tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
• The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
• Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
• Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

Operation Instructions